Copper electroless plating in weakly alkaline electrolytes using DMAB as a reducing agent for metallization on polymer films

نویسندگان

  • adiia Kulyk
  • Serhiy Cherevko
  • Chan-Hwa Chung
چکیده

Copper electroless plating at low pH (7–9) using dimethylamine borane complex as a reducing agent is studied electrochemically by linear sweep voltammetry, cyclic voltammetry and chronopotentiometry in full electrolytes. We find that the mixed potential theory is not applicable to the described system. We show that both the working potential and the rate-controlling mechanism are dependent on the pH of the solution. The effects of altering the mechanism on the resulting film conductivity, morphology and

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

CoWBP capping barrier layer for sub 90 nm Cu interconnects

Electroless cobalt films have been obtained by deposition using a plating bath containing two reducing agents: dimethylamineborane (DMAB) and sodium hypophosphite. This formulation allows spontaneous activation on copper followed by auto catalytic electroless plating. CoWBP and CoBP films are proposed as diffusion barriers and encapsulation layers, for copper lines and via contacts for ULSI int...

متن کامل

Selective Metallization of Cured Su-8 Microstructures Using Electroless Plating Method

In this talk, we report a research work on fabrication and metallization of high aspect ratio polymer microstructures fabricated using UV lithography of SU-8 on silicon substrate. Electroless plating of metal film on both the top and sidewall surfaces of microstructures were achieved while the silicon substrate was not plated. The primary chemical mechanisms and possible applications were also ...

متن کامل

Formation of copper nanowires by electroless deposition using microtubules as templates.

Microtubules (MTs) are self-assembling, protein-based, tubular structures several micrometers long with outer and inner diameters of 25 nm and 15 nm, respectively. This aspect ratio makes MTs ideal templates for producing nanowires for applications such as electrical nano-interconnects. MTs are poorly conductive and their use as interconnects necessitates their metallization. We report a proces...

متن کامل

ELECTROLYTIC RECOVERY OF COPPER FROM CHELATED WASTE STREhMS

Electroless plating is a chemical reduction process which depends upon the catalytic reduction of a metallic ion in an aqueous solution containing a reducing agent without the use of electricity (1). Cahill (2) showed that the cupric ion could be reduced autocatalytically with formaldehyde in an alkaline solution. Okinaka (3 ) established that the overall reaction of the catalytic copper platin...

متن کامل

Polyimide surface modification by using microwave plasma for adhesion enhancement of Cu electroless plating.

Microwave (MW) plasma was applied to the surface of polyimide (PI) films as a treatment to enhance the adhesion between copper deposition layer and PI surface for electroless plating. The influences of nitrogen MW plasma treatment on chemical composition of the PI surface were investigated by using X-Ray photoelectron spectroscopy (XPS). The wettability was also investigated by water contact an...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2011